Etch: Mark II, Mxp, Mxp+, Emxp+, SuperE, Emax
CVD: Standard Body, Universal Body, Etch Back
Support: Aligner, Cool-down
KENSINGTON LABS
Robot Repair / Wafer Handlers
NANOMETRICS
Units IN STOCK - IMMEDIATE SHIP
PLCC Altera 7128 legacy support
Legacy IR PA support - multiple upgrade options
OTHER OEM SUPPORT
5500 Endura
Therma-Wave Therma-probe / Opti-probe
Semitool VTP 1500 / Equinox plating
GSI Lumonics Laser Repair
P5000 Precision
5200 Centura
Xsys Engineering Inc. | 2016 All Rights Reserved
LEGACY FEATURED ITEMS ($)
AMAT PRODUCER A / B w/ Off Axis PA
ESI 8000 / 9000 series Laser Repair
Gasonics / Novellus PEP series
Xsys Engineering, inc Semiconductor Robotics Repair
Xsys Engineering provides complete support and services for a multitude of OEM production tools utilized in virtually every stage of the silicon wafer manufacturing process. Our shop facilities consists of 2800 sq ft of shop space reserved for the repair and re-manufacturing of this equipment. We employ 8 complete repair workstations in order to maximize through-put. Our standard practice is to provide the principals of FIFO (First In / First Out) - although we also capable of offering expedited services, including "SAME DAY SHIP" at a reasonable premium.
ADE Semiconductor CR80, CR81 Wafer Inspection
ADE Semiconductor Constellation - 200mm / 300mm
Zeiss Axiospec Series Inspection
PARTS - TRAINING - FIELD SERVICE
Nanospec 9100 - spectroscopic ellipsometry, N2000
Nanospec 9200 - Cassette / SMIF, N2000 software
Nanospec 9300 - 300mm Dual Over/Under Wafer Handling
TRI-CCD Pre-aligner Support
Consumables: Bearings, Lead Nuts, Seals, Encoder Scales
Read Heads, Power Head Motor Brushes, Power Supplies
World-wide FSE support available, Formal training
Consumables In-Stock
APPLIED MATERIALS (AMAT)
WFH4D: Through-beam TRI-CCD Prealigner equipped
Multi-Link - All configs / Off Axis Integrated "pop-up"
Stages / Actuators: 6000 / 8500 X2 0.1um / Mini Z V.1
M4000 Motion Controller: All configurations, built to suite
PCB Board repair / spares / exchange
Spare Parts / Rebuild Kits / Technical Manuals
Etch: Mark II, Mxp, Mxp+, Emxp+, SuperE, Emax
CVD: Standard, universal body etch DXZ, WXZ, HDP, HDP+
PVD: Standard body, wide body
Nanospec 8000 X XSE Inspection (Linear / Rotary Turret)
Nanospec 8300 - 300mm, O/A 6000.4 Stage Pre-aligner
Nanospec 9000 (i) - 200mm / 300mm configured
Repair / Refurbishment / Complete spares - Nano System XY mini Z Stages. All configurations - 6000x2, 8" Mini V.1 / 8500 12" travel - Legacy OS2 WARP Hard Drive Backup / Repair / Restore
PVD: Standard body, wide body, SIP, HTHU
Etch: Preclean I and Preclean II
Orienter, Degas, Cool-down, Loadlocks narrow/wide
Thin Film Measurement Metrology
585 Emory Street | San Jose, CA 95110 | 408-645-5443 | 408-835-8034