cnc machine shop machining services fremont robot repair

585 Emory Street    |     San Jose, CA 95110   |     408-645-5443  |    408-835-8034 

Xsys Engineering Machine Shop Machining services fremont CA semiconductor robot repair
Xsys Engineering Semiconductor Sales Repair Services
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Xsys Engineering Semiconductor Sales Repair Services
Xsys Engineering Semiconductor Sales Repair Services

Etch: Mark II, Mxp, Mxp+, Emxp+, SuperE, Emax
CVD:  Standard Body, Universal Body, Etch Back
Support:  Aligner, Cool-down

LAM, GenMark, Kensington Labs, Applied Materials, ​Therma-Wave, Gasonics, ​KLA Tencor, Zeiss, Nanometrics, Semitool Robot Repair

         KENSINGTON LABS

Robot Repair / Wafer Handlers

Kensington Labs TRICCD repair services

NANOMETRICS

Units IN STOCK - IMMEDIATE SHIP
PLCC Altera 7128 legacy support
Legacy IR PA support - multiple upgrade options

Consumables:  Bearings, Lead Nuts, Seals, Encoder Scales
Read Heads, Power Head Motor Brushes, Power Supplies
World-wide FSE support available, Formal training

Consumables In-Stock

OTHER OEM SUPPORT

 5500 Endura 

Therma-Wave Therma-probe / Opti-probe
Semitool VTP 1500 / Equinox plating
GSI Lumonics Laser Repair

APPLIED MATERIALS (AMAT)

WFH4D: Through-beam TRI-CCD Prealigner equipped
Multi-Link - All configs / Off Axis Integrated "pop-up"
Stages / Actuators:  6000 / 8500 X2 0.1um / Mini Z V.1
M4000 Motion Controller: All configurations, built to suite
PCB Board repair / spares / exchange
Spare Parts / Rebuild Kits / Technical Manuals

Etch: Mark II, Mxp, Mxp+, Emxp+, SuperE, Emax
CVD: Standard, universal body etch DXZ, WXZ, HDP, HDP+
PVD: Standard body, wide body

Nanospec 8000 X XSE Inspection (Linear / Rotary Turret)
Nanospec 8300 - 300mm, O/A 6000.4 Stage Pre-aligner
Nanospec 9000 (i) - 200mm / 300mm configured

Repair / Refurbishment / Complete spares - Nano System XY mini Z Stages.  All configurations - 6000x2, 8" Mini V.1 / 8500 12" travel - Legacy OS2 WARP Hard Drive Backup / Repair / Restore

LAM, GenMark, Kensington Labs, Applied Materials, ​Therma-Wave, Gasonics, ​KLA Tencor, Zeiss, Nanometrics, Semitool Robot Repair

 P5000 Precision 

 5200 Centura 

Nanometrics 8000 9100 XY mini Z Stage robot repair
Kensington labs robot repair WFH4D TriCCD
LAM, GenMark, Kensington Labs, Applied Materials, ​Therma-Wave, Gasonics, ​KLA Tencor, Zeiss, Nanometrics, Semitool Robot Repair

PVD: Standard body, wide body, SIP, HTHU
Etch: Preclean I and Preclean II
Orienter, Degas, Cool-down, Loadlocks narrow/wide

Thin Film Measurement Metrology

​Xsys Engineering  Inc.    |   2016 All Rights Reserved 

LEGACY FEATURED ITEMS ($)

AMAT Producer

AMAT PRODUCER A / B w/ Off Axis PA
ESI 8000 / 9000 series Laser Repair
Gasonics / Novellus PEP series

Xsys Engineering, inc Semiconductor Robotics Repair

Xsys Engineering provides complete support and services for a multitude of OEM production tools utilized in virtually every stage of the silicon wafer manufacturing process.  Our shop facilities consists of 2800 sq ft of shop space reserved for the repair and re-manufacturing of this equipment.   We employ 8 complete repair workstations in order to maximize through-put.  Our standard practice is to provide the principals of FIFO (First In / First Out) - although we also capable of offering expedited services, including "SAME DAY SHIP" at a reasonable premium.

ADE Semiconductor CR80, CR81 Wafer Inspection
ADE Semiconductor Constellation - 200mm / 300mm
Zeiss Axiospec Series Inspection 

PARTS - TRAINING - FIELD SERVICE

Nanospec 9100 - spectroscopic ellipsometry, N2000
Nanospec 9200 - Cassette / SMIF, N2000 software
Nanospec 9300 - 300mm Dual Over/Under Wafer Handling

TRI-CCD Pre-aligner Support